| Issue |
Eur. Phys. J. Appl. Phys.
Volume 27, Number 1-3, July-September 2004
Tenth International Conference on Defects: Recognition, Imaging and Physics in Semiconductors (DRIP X)
|
|
|---|---|---|
| Page(s) | 159 - 161 | |
| Section | Defects in silicon | |
| DOI | https://doi.org/10.1051/epjap:2004084 | |
| Published online | 15 July 2004 | |
https://doi.org/10.1051/epjap:2004084
Distribution and properties of oxide precipitates in annealed nitrogen doped 300 mm Si wafers
1
IHP, Im Technologiepark 25, 15236 Frankfurt (Oder), Germany
2
IHP/BTU Joint Lab, Universitätsplatz 3-4, 03044 Cottbus,
Germany
3
BTU, Universitätsplatz 3-4, 03044 Cottbus, Germany
4
Wacker Siltronic AG
(Present name: Siltronic AG) , PO Box
1140, 84479 Burghausen, Germany
5
Max-Planck-Institut für Mikrostrukturphysik, Weinberg 2,
06120 Halle, Germany
Corresponding author: akhmetov@tu-cottbus.de
Received:
23
July
2003
Accepted:
10
February
2004
Published online: 15 July 2004
Spatial distribution and properties of oxide were examined in
300 mm nitrogen (N) doped CZ-Si. Experimentally grown materials
with N ranging from
~ 1013 cm−3 to 1015 cm−3 were studied by
infrared light scattering tomography, scanning infrared microscopy,
transmission electron microscopy and electron beam induced current.
It was established that an increasing N content improves the
uniformity of the radial distribution of precipitates in the bulk of
the wafer, the density of precipitates reaching a level of
~ 109 cm−3. The width of the denuded zone varies in the
range from 
m to 
m depending on radial position and
N doping level. Electron microscopy revealed lower oxide precipitate
densities of about 105 to 108 cm−3. The results are
interpreted in terms of existence of agglomerates of nanometer size
precipitate nuclei and/or by the defect-induced strain relaxation
around the precipitates.
PACS: 61.72.Yx – Interaction between different crystal defects; gettering effect / 61.72.Qq – Microscopic defects (voids, inclusions, etc.) / 78.35.+c – Brillouin and Rayleigh scattering; other light scattering
© EDP Sciences, 2004
Current usage metrics show cumulative count of Article Views (full-text article views including HTML views, PDF and ePub downloads, according to the available data) and Abstracts Views on Vision4Press platform.
Data correspond to usage on the plateform after 2015. The current usage metrics is available 48-96 hours after online publication and is updated daily on week days.
Initial download of the metrics may take a while.