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Cited article:

Two Specific Behaviors of Breakdown Occurrence Depending on N2 Annealing Temperature in Poly-Si/SiN/Poly-Si Capacitors

Hisatsugu Kurita, Masataka Nakamura, Hayato Miyagawa and Yoshiaki Kamigaki
ECS Journal of Solid State Science and Technology 12 (7) 073010 (2023)
https://doi.org/10.1149/2162-8777/ace84b