Analysis of superconducting silicon epilayers by atom probe tomography: composition and evaporation field | The European Physical Journal Applied Physics (EPJ AP)

Special Issue on ‘Advances in Renewable Energies, Materials and Technology’, edited by Laurene Tetard, Hamid Oughaddou, Abdelkader Kara, Yannick Dappe and Nabil Rochdi

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Fig. 2

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Distribution of Boron for the GILD sample: (a) one-dimensional boron depth distribution calculated by integrating the data of Figure 1 over a cylindrical volume with a radius of 10 nm. (b) Distribution of the boron content (histogram) in sets of 200 atoms located in 30 × 30 × 10 nm³ data slice (position Z2) compared to a binomial distribution.

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