Regular Article

Angular distribution of sputtered particles from Inconel⁷¹⁸: a simulation study

¹ Laboratory of Artificial Intelligence & Complex Systems Engineering (AICSE), National Graduate School of Arts and Crafts, Hassan II University, Casablanca, Morocco
² Department of Chemistry, Queen’s University, Kingston, ON K7L 3N6, Canada
³ Laboratory of Materials, Energy, and Environment, Cadi Ayyad University, Marrakech, Morocco

^* e-mail: nunzijm@queensu.ca

Received: 31 December 2022
Received in final form: 7 March 2023
Accepted: 14 March 2023
Published online: 17 April 2023

Abstract

The angular distribution of sputtered particles is an effective tool for obtaining information on the composition and structure of the target and even on the beam energies. The particles of Inconel⁷¹⁸ super alloy sputtered at full angle corresponding to each of the probes were calculated. The SRIM program associated with a new ANGULARE simulation program was used to obtain the sputtering yields and angular distribution of sputtered Fe, Al, Cr, Mo, Nb, Ni and Ti particles from Inconel⁷¹⁸. The simulation was performed for a large number of incident ions (5 keV, Kr⁺) and allows the computer to count the number of particles emitted at the solid angle. Angular distributions of pulverized Inconel⁷¹⁸ particles and pulverized yields were compared to the literature. Furthermore, the angular distribution of Inconel⁷¹⁸ for the differential sputtering yields shows an under-cosine tendency.