Eur. Phys. J. Appl. Phys.
Volume 80, Number 3, December 2017
|Number of page(s)||4|
|Section||Semiconductors and Devices|
|Published online||20 November 2017|
The improvement of phase-change properties on Ge2Sb2Te5 using the superlattice-like structure
School of Mathematics and Physics, Jiangsu University of Technology,
213001, PR China
Received in final form: 9 October 2017
Accepted: 24 October 2017
Published online: 20 November 2017
Ge2Sb2Te5 (GST)/Ge superlattice-like (SLL) films are investigated in the study. Reflection spectra measurements with polarized excitations and atomic force microscopy are carried out to investigate phase-change properties. Because of the Ge cladding films, GST phase-change properties could be improved. The thicker Ge cladding film is believed could lead to a relatively larger grain size. GST phase-change behaviors in the films can be adjusted by changing the layer thickness. We found the [GST(5 nm)/Ge(5 nm)]10 SLL film has the higher crystallization temperature, faster phase change speed, better thermal stability and relatively smooth surface. The GST/Ge SLL films may have the potential for commercial use.
© EDP Sciences, 2017
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