Research Article

The improvement of phase-change properties on Ge₂Sb₂Te₅ using the superlattice-like structure

School of Mathematics and Physics, Jiangsu University of Technology, Changzhou 213001, PR China

^* e-mails: zhengphy@163.com; pcram@jsut.edu.cn

Received: 23 July 2017
Received in final form: 9 October 2017
Accepted: 24 October 2017
Published online: 20 November 2017

Abstract

Ge₂Sb₂Te₅ (GST)/Ge superlattice-like (SLL) films are investigated in the study. Reflection spectra measurements with polarized excitations and atomic force microscopy are carried out to investigate phase-change properties. Because of the Ge cladding films, GST phase-change properties could be improved. The thicker Ge cladding film is believed could lead to a relatively larger grain size. GST phase-change behaviors in the films can be adjusted by changing the layer thickness. We found the [GST(5 nm)/Ge(5 nm)]₁₀ SLL film has the higher crystallization temperature, faster phase change speed, better thermal stability and relatively smooth surface. The GST/Ge SLL films may have the potential for commercial use.