Eur. Phys. J. Appl. Phys.
Volume 64, Number 1, October 2013
|Number of page(s)||4|
|Published online||25 October 2013|
XPS and cathodoluminescence studies of HfO2, Sc2O3 and (HfO2)1-x(Sc2O3)x films
Boreskov Institute of Catalysis, Lavrentiev ave. 5, 630090
Novosibirsk, Russian Federation
2 Ioffe Physical Technical Institute, Polytechnicheskaya st. 26, 194021 Saint Petersburg, Russian Federation
3 Nikolaev Institute of Inorganic Chemistry, Lavrentiev ave. 3, 630090 Novosibirsk, Russian Federation
4 Rzhanov Institute of Semiconductor Physics, Lavrentiev ave. 13, 630090 Novosibirsk, Russian Federation
a e-mail: firstname.lastname@example.org
Revised: 16 May 2013
Accepted: 5 September 2013
Published online: 25 October 2013
X-ray photoelectron spectroscopy (XPS) and cathodoluminescence (CL) method have been employed to study the chemical composition and the oxygen vacancy concentration of HfO2, Sc2 O3 and (HfO2)1−x(Sc2O3)x films. It was found that the increase of Sc content led to monotonic decreasing the Hf4f7/2 and Sc2p3/2 binding energies indicating to form solid solution (HfO2)1−x(Sc2O3)x. All the samples characterized by the intensive CL spectra with maximum around 3 eV which originated due to some radiative recombination emission caused by oxygen deficiency. The concentration of oxygen vacancy in the Sc-doped HfO2 is sensitive to the Sc content and as a result the intensity of CL spectra of (HfO2)1−x(Sc2O3)x is lower that those of pure HfO2 and Sc2O3.
© EDP Sciences, 2013
Current usage metrics show cumulative count of Article Views (full-text article views including HTML views, PDF and ePub downloads, according to the available data) and Abstracts Views on Vision4Press platform.
Data correspond to usage on the plateform after 2015. The current usage metrics is available 48-96 hours after online publication and is updated daily on week days.
Initial download of the metrics may take a while.