Issue |
Eur. Phys. J. Appl. Phys.
Volume 54, Number 3, June 2011
Focus on Recent advances in (S)TEM and related spectroscopies: a tribute to C. Colliex
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|
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Article Number | 33505 | |
Number of page(s) | 11 | |
DOI | https://doi.org/10.1051/epjap/2011100429 | |
Published online | 14 June 2011 |
https://doi.org/10.1051/epjap/2011100429
Dedicated STEM for 200 to 40 keV operation*
Nion Co., 1102 8th St., Kirkland, WA 98033, USA
www.nion.com
a e-mail: krivanek.ondrej@gmail.com
Received:
23
October
2010
Revised:
28
February
2011
Accepted:
14
March
2011
Published online:
13
June
2011
A dedicated STEM developed for operation at primary energies from 200 keV to 40 keV and lower is described. It has a new cold field emission gun (CFEG) that gives a normalized brightness of 3 × 108 A/(m2 sr V), and excellent short-term and long-term stability. It includes two gun lenses (one electrostatic and one electromagnetic), a fast electrostatic beam blanker, three condenser lenses, a corrector of third- and fifth-order geometric aberrations, an objective lens with low aberration coefficients, a flexible set of projector lenses, an ultra-stable sample stage, and provision for storing up to five samples under high vacuum and loading them into the microscope’s objective lens under remote control. The microscope is enclosed in a magnetically and acoustically shielding enclosure, which allows it to operate at a high performance level even in non-optimal environments. It has reached 53 pm resolution at 200 keV and 123 pm at 40 keV, and an EELS energy resolution of 0.26 eV.
© EDP Sciences, 2011
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