Eur. Phys. J. Appl. Phys.
Volume 45, Number 1, January 2009
|Number of page(s)||8|
|Section||Plasma, Discharges and Processes|
|Published online||14 January 2009|
Diagnostic of 13.56 MHz RF sustained Ar–N2 plasma by optical emission spectroscopy
Department of Physics, Gomal University, D.I. Khan, Pakistan
2 Department of Physics, Quaid-i-Azam University, 45320 Islamabad, Pakistan
3 Department of Physics, Peshawar University, Peshawar, Pakistan
4 National Tokamak Fusion Program, 3329 Islamabad, Pakistan
Corresponding author: firstname.lastname@example.org
Revised: 10 July 2008
Accepted: 1 November 2008
Published online: 14 January 2009
Optical Emission Spectroscopy (OES) is used to investigate the effect of argon gas mixing on the electron temperature, the degree of nitrogen dissociation and the active species concentration in a 13.56 MHz radio frequency (RF) sustained nitrogen plasma. The electron temperature is determined from Ar-I emission line intensities by using the modified Boltzmann's plot method and is found to be increased with argon mixing in nitrogen plasma. The concentration of active species and is monitored in terms of the emission intensities of nitrogen (0–0) bands of the second positive and the first negative systems respectively. The concentration of active species along with the degree of N2-dissociation is appreciably enhanced by argon mixing signifying the role of argon metastables in the excitation and dissociation processes.
PACS: 52.80.Pi – High-frequency and RF discharges / 52.70.Kz – Optical (ultraviolet, visible, infrared) measurements / 81.65.Lp – Surface hardening: nitridation, carburization, carbonitridation / 51.50.+v – Electrical properties
© EDP Sciences, 2009
Current usage metrics show cumulative count of Article Views (full-text article views including HTML views, PDF and ePub downloads, according to the available data) and Abstracts Views on Vision4Press platform.
Data correspond to usage on the plateform after 2015. The current usage metrics is available 48-96 hours after online publication and is updated daily on week days.
Initial download of the metrics may take a while.