Eur. Phys. J. Appl. Phys.
Volume 77, Number 1, January 2017
|Number of page(s)||8|
|Section||Plasma, Discharges and Processes|
|Published online||27 January 2017|
Influence of argon fraction on plasma parameters in H2-N2 mixture discharge with cathodic cage
Department of Physics, Quaid-i-Azam University, 45320 Islamabad, Pakistan
2 Department of Physics, Faculty of Science, Jazan University, P.O. Box 114, Jazan, Saudi Arabia
a e-mail: email@example.com
Revised: 20 October 2016
Accepted: 5 December 2016
Published online: 27 January 2017
Low-pressure H2-N2 mixture pulsed DC plasmas with a cathodic cage (active screen) are widely used for plasma nitriding applications. In this study, the low-pressure H2-N2 mixture plasma with a cathodic cage generated by 50 Hz pulsed DC source is investigated with triple Langmuir probe and optical emission spectroscopy. The electron temperature (TeLP) and electron number density (ne) are measured using a triple Langmuir probe (TLP). The excitation temperature (TexcOES) is calculated spectroscopically using Boltzmann plot method whereas nitrogen dissociation fraction is estimated using actinometry as well as the intensity ratio method (IN (746.83 nm)/IN2(337.1 nm)). The results show that the electron and excitation temperatures, electron density and nitrogen atomic species density [N] all increase with the argon admixture, however, the important molecular ionized species density [N2+] significantly decreases beyond 30% addition. This study provides useful information about the influence of the argon addition on plasma parameters and active species generation. As a result it helps to optimize the plasma nitriding system as a function of argon admixture to avoid random trials in the processing.
© EDP Sciences, 2017
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