Eur. Phys. J. AP
Volume 19, Number 3, September 2002
|Page(s)||201 - 209|
|Section||Imaging, Microscopy and Spectroscopy|
|Published online||12 September 2002|
Study of the dc and 100 kHz glow discharges in acetylene-nitrogen mixture by means of optical emission spectroscopy
Institute of Inorganic Chemistry and Metallurgy of Rare Elements,
Chemistry Department, Wroclaw University of Technology
Wyb. Wyspianskiego 27, 50-370 Wroclaw, Poland
Corresponding author: email@example.com
Revised: 19 April 2002
Accepted: 11 June 2002
Published online: 12 September 2002
The dc and 100 kHz low pressure discharges in acetylene-nitrogen mixture have been studied here. Optical emission spectroscopy was used for identification of active plasma components and to determine plasma temperature. Relative concentrations of H, CH and CN were investigated versus experimental conditions by optical actinometry techniques. Emission intensities of N2 and N normalized to intensity of argon line were also monitored as a function of experimental parameters. The rotational temperatures from the N B-X (0-0) and CN B2Σ+-X2Σ+ (0-0) bands and vibrational temperatures from the CN (B2Σ+-X2Σ+) and N2 (C-B) spectra were determined. Plasma processes and plasma equilibrium state were discussed.
PACS: 52.70.-m – Plasma diagnostic techniques and instrumentation / 52.80.-s – Electric discharges / 52.20.-j – Elementary processes in plasmas
© EDP Sciences, 2002
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