HTTP_Request2_Exception Unable to connect to tcp:// Error: Connection timed out Critical dimension of biperiodic gratings determined by spectral ellipsometry and Mueller matrix polarimetry | The European Physical Journal Applied Physics (EPJ AP)
Open Access
Eur. Phys. J. Appl. Phys.
Volume 42, Number 3, June 2008
Page(s) 351 - 359
Section Instrumentation and Metrology
Published online 04 June 2008

© EDP Sciences, 2008

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