Eur. Phys. J. Appl. Phys.
Volume 89, Number 2, February 2020
Disordered Semiconductors: Physics and Applications
|Number of page(s)||6|
|Section||Nanomaterials and Nanotechnologies|
|Published online||15 April 2020|
Synthesis and surface modification of light emitting silicon nanoparticles using non-thermal plasma techniques★
Institute of Physics of the Czech Academy of Sciences, Cukrovarnická 10, 16200 Praha, Czech Republic
* e-mail: firstname.lastname@example.org
Received in final form: 31 January 2020
Accepted: 18 February 2020
Published online: 15 April 2020
We have synthesised silicon nanoparticles (Si-NPs) with photoluminescence ranging from blue to IR spectral region using a low-pressure RF plasma in a flow-through glass tube reactor. The spectral position of photoluminescence band of Si-NPs is controlled by the synthesis parameters such as plasma power, silane and hydrogen concentration and pressure in the working area. Modification of Si-NPs surface both on air after the synthesis and in the vacuum chamber by second plasma in methylsilane atmosphere causes a blue spectral shift of the photoluminescence band.
© EDP Sciences, 2020
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