Eur. Phys. J. Appl. Phys.
Volume 78, Number 2, May 2017
|Number of page(s)||8|
|Section||Imaging, Microscopy and Spectroscopy|
|Published online||19 May 2017|
Design, development and applications of etched multilayers for soft X-ray spectroscopy
Sorbonne Universités, UPMC Université Paris 06, Laboratoire de Chimie Physique – Matière et Rayonnement, 11 rue Pierre et Marie Curie, 75231 Paris Cedex 05, France
2 CNRS UMR 7614, Laboratoire de Chimie Physique – Matière et Rayonnement, 11 rue Pierre et Marie Curie, 75231 Paris Cedex 05, France
3 Institut d’Électronique Fondamentale, Université Paris-Sud, CNRS, 91405 Orsay Cedex, France
a e-mail: email@example.com
Revised: 22 March 2017
Accepted: 20 April 2017
Published online: 19 May 2017
An etched multilayer, a 2D structure fabricated by etching a periodic multilayer according to the pattern of a laminar grating, is applied in the soft X-ray range to improve the spectral resolution of wavelength dispersive spectrometers. The present article gathers all the successive stages of the development of such a device optimized to analyze the characteristic emission of light elements: design, structural and optical characterization and applications to X-ray spectroscopy. The evolution of the shape of the C Kα emission band of highly oriented pyrolytic graphite (HOPG), as a function of the angle between the emission direction and the (0 0 0 1) planes, is measured. These results, compared to those with a grating, demonstrate that the achieved spectral resolution enables disentangling σ → 1s and π → 1s transitions within the C K emission band.
© EDP Sciences, 2017
Current usage metrics show cumulative count of Article Views (full-text article views including HTML views, PDF and ePub downloads, according to the available data) and Abstracts Views on Vision4Press platform.
Data correspond to usage on the plateform after 2015. The current usage metrics is available 48-96 hours after online publication and is updated daily on week days.
Initial download of the metrics may take a while.