Eur. Phys. J. Appl. Phys.
Volume 31, Number 2, August 2005
|Page(s)||147 - 152|
|Section||Instrumentation and Metrology|
|Published online||18 August 2005|
MONOX: a characterization tool for the X-UV range
Laboratoire de Chimie Physique-Matière et Rayonnement,
Université Pierre et Marie Curie, UMR/CNRS 7614, 11 rue Pierre et Marie
Curie, 75231 Paris Cedex 05, France
Revised: 7 March 2005
Accepted: 8 April 2005
Published online: 18 August 2005
A new laboratory apparatus devoted to the characterization of various devices for the X-UV range (100–5000 eV), such as mirrors, diffraction gratings, spectrometers or detectors is described. The apparatus includes open X-ray tubes as X-ray sources, a two-crystal monochromator for wavelength selection and a goniometer. Various examples of its use are presented: dispersive mode where the radiation coming from the X-ray tube is dispersed by the two-crystal monochromator, spectrometric mode where the goniometer is used as a plane X-ray spectrometer and reflectometric mode where a selected wavelength is used to perform absolute reflectivity measurements.
PACS: 07.85.Fv – X- and gamma-ray sources, mirrors, gratings, and detectors / 61.10.Kw – X-ray reflectometry (surfaces, interfaces, films) / 41.50.+h – X-ray beams and X-ray optics / 78.67.Pt – Multilayers; superlattices
© EDP Sciences, 2005
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