Eur. Phys. J. Appl. Phys.
Volume 75, Number 2, August 2016
6th Central European Symposium on Plasma Chemistry (CESPC-6)
|Number of page(s)||5|
|Section||Plasma, Discharges and Processes|
|Published online||08 August 2016|
Plasma chemical production of stable isotopes of germanium from its fluorides*
G.G. Devyatykh Institute of Chemistry of High-Purity Substances of RAS, 49 Tropinin str., Nizhny Novgorod 603950, Russia
a e-mail: email@example.com
Accepted: 14 March 2016
Published online: 8 August 2016
The reduction process of 72GeF4 in hydrogen plasma of RF-discharge (13.56 MHz) was experimentally investigated. It was found that 72Ge, polyfluorogermanes and gaseous HF were the main products of conversion. The behavior of the main electroactive impurities and of metal impurities in the process of hydrogen reduction of 72GeF4 was considered. Based on the data of emission spectroscopy of chemically active plasma, assumptions were made about the main plasma-chemical reactions responsible for the process of hydrogen reduction of 72GeF4. A single crystal of n-type with concentration of charge carriers of <1 × 1013 cm3, ρ = 47 Ω cm was produced using a Czochralski method after the process of zone recrystallization of 72Ge.
© EDP Sciences, 2016
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