Eur. Phys. J. Appl. Phys.
Volume 47, Number 2, August 200911th International Symposium on High Pressure, Low Temperature Plasma Chemistry (HAKONE XI)
|Number of page(s)||6|
|Section||11th International Symposium on High Pressure, Low Temperature Plasma Chemistry (HAKONE XI)|
|Published online||28 April 2009|
Deposition of functional hydrogenated amorphous carbon-nitride film (a-CN:H) using C2H4/N2 townsend dielectric barrier discharge
Université de Toulouse, UPS, INPT, LAPLACE – Laboratoire Plasma et
Conversion d'Énergie, 118 route de Narbonne, 31062 Toulouse Cedex 9, France
2 CNRS, LAPLACE, 31062 Toulouse, France
3 University Hospital Research Center CHUQ, St-Francois d'Assise Hospital, 10 rue de l'Espinay, G1L3L5, Quebec, Canada
4 Surface Engineering Laboratory, CERMA, Department of Mining, Metallurgical and Materials Engineering, Université Laval, G1V 0A6, Quebec, Canada
5 CNRS, PROMES, Tecnosud, 66100 Perpignan, France
Corresponding author: firstname.lastname@example.org
Accepted: 2 March 2009
Published online: 28 April 2009
The present work is an investigation of the chemical composition and growth profile of an hydrogenated amorphous carbon nitride film (a-CN:H) deposited by atmospheric pressure Townsend discharge in C2H4/N2. Various surface characterization techniques were used to evaluate the coatings properties (X-ray Photoelectron Spectroscopy, Fourier Transform Infrared Spectroscopy, Profilometry, Scanning Electron Microscopy). The coating obtained presented a high N/C ratio and a high concentration of N-functionalities. The results revealed two different growth mechanisms depending on the residence time of the precursor molecules; at first, the growth is mainly due to radicals then a powder formation mechanism appears, therefore leading to different chemical composition and surface properties.
PACS: 52.80.Dy – Low-field and Townsend discharges / 52.77.Dq – Plasma-based ion implantation and deposition / 68.37.-d – Microscopy of surfaces, interfaces, and thin films / 68.55.-a – Thin film structure and morphology
© EDP Sciences, 2009
Current usage metrics show cumulative count of Article Views (full-text article views including HTML views, PDF and ePub downloads, according to the available data) and Abstracts Views on Vision4Press platform.
Data correspond to usage on the plateform after 2015. The current usage metrics is available 48-96 hours after online publication and is updated daily on week days.
Initial download of the metrics may take a while.