Eur. Phys. J. Appl. Phys.
Volume 47, Number 2, August 200911th International Symposium on High Pressure, Low Temperature Plasma Chemistry (HAKONE XI)
|Number of page(s)||6|
|Section||11th International Symposium on High Pressure, Low Temperature Plasma Chemistry (HAKONE XI)|
|Published online||28 April 2009|
Deposition of functional hydrogenated amorphous carbon-nitride film (a-CN:H) using C2H4/N2 townsend dielectric barrier discharge
Université de Toulouse, UPS, INPT, LAPLACE – Laboratoire Plasma et
Conversion d'Énergie, 118 route de Narbonne, 31062 Toulouse Cedex 9, France
2 CNRS, LAPLACE, 31062 Toulouse, France
3 University Hospital Research Center CHUQ, St-Francois d'Assise Hospital, 10 rue de l'Espinay, G1L3L5, Quebec, Canada
4 Surface Engineering Laboratory, CERMA, Department of Mining, Metallurgical and Materials Engineering, Université Laval, G1V 0A6, Quebec, Canada
5 CNRS, PROMES, Tecnosud, 66100 Perpignan, France
Corresponding author: email@example.com
Accepted: 2 March 2009
Published online: 28 April 2009
The present work is an investigation of the chemical composition and growth profile of an hydrogenated amorphous carbon nitride film (a-CN:H) deposited by atmospheric pressure Townsend discharge in C2H4/N2. Various surface characterization techniques were used to evaluate the coatings properties (X-ray Photoelectron Spectroscopy, Fourier Transform Infrared Spectroscopy, Profilometry, Scanning Electron Microscopy). The coating obtained presented a high N/C ratio and a high concentration of N-functionalities. The results revealed two different growth mechanisms depending on the residence time of the precursor molecules; at first, the growth is mainly due to radicals then a powder formation mechanism appears, therefore leading to different chemical composition and surface properties.
PACS: 52.80.Dy – Low-field and Townsend discharges / 52.77.Dq – Plasma-based ion implantation and deposition / 68.37.-d – Microscopy of surfaces, interfaces, and thin films / 68.55.-a – Thin film structure and morphology
© EDP Sciences, 2009
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