Eur. Phys. J. Appl. Phys.
Volume 42, Number 1, April 2008
16th International Colloquium on Plasma Processes (CIP 2007)
|Page(s)||41 - 46|
|Section||Plasma, Discharge and Processes|
|Published online||19 March 2008|
Microwave plasmas at atmospheric pressure: theoretical insight and applications in surface treatment
Laboratoire de Science et Génie des Surfaces, Nancy-Université,
CNRS, Parc de Saurupt, CS 14234, 54042 Nancy Cedex, France
Corresponding author: email@example.com
Revised: 29 August 2007
Accepted: 15 January 2008
Published online: 19 March 2008
This work is an assessment of recent developments on microwave plasmas at atmospheric pressure and their applications in the field of surface treatment. A special attention is paid to the question of the accuracy of data at high temperature (above 2000 K) and to the non-locality of the energy dissipation in argon and helium plasmas.
PACS: 34.50.Dy – Interactions of atoms and molecules with surfaces; photon and electron emission; neutralization of ions
© EDP Sciences, 2008
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