Eur. Phys. J. Appl. Phys.
Volume 36, Number 1, October 2006
|Page(s)||17 - 23|
|Section||Characterization of Materials: Imaging, Microscopy and Spectroscopy|
|Published online||06 October 2006|
Influence of hydrogen partial pressure on growth and properties of nanocrystalline SiC by magnetron sputtering
LPMC, Faculté des Sciences de Tunis, Campus Universitaire El
Menzeh, 1060 Tunis, Tunisia
2 Faculté des Sciences de Bizerte, 7021 Zarzouna, Bizerte, Tunisia
3 IEMN, avenue Poincaré, BP 69, 59652 Villeneuve d'Ascq Cedex, France
4 SIFCOM, CNRS UMR 6176, 6 boulevard Maréchal Juin, 14050 Caen, France
5 LPMC, Faculté des Sciences d'Amiens, 33 rue Saint-Leu, 80039 Amiens Cedex, France
Corresponding author: email@example.com
Revised: 30 June 2006
Accepted: 10 July 2006
Published online: 6 October 2006
Hydrogenated nanocrystalline silicon carbide (nc-SiC:H) thin films were prepared by reactive magnetron sputtering. Deposition was achieved in a plasma of argon (Ar) and an hydrogen (H2) gas mixture with various H2 dilution percentages (10–80% H2) at a fixed substrate temperature of 500 °C. In order to describe the local bonding and the relative proportion of the different complexes formed during growth, the films were investigated by means of Fourier Transform Infrared absorption and Raman spectroscopy. Other structural features were analyzed by AFM measurements, electron diffraction and high resolution transmission electron microscopy observations. Optical and electrical properties of the films were also characterized. This study shows that hydrogen dilution plays an important role on the microstructure of the films as well as on their properties. The highest refractive index was obtained for a 60% ratio of hydrogen in the plasma and the highest dark conductivity found was 2.03 × 10−4 Ω−1 cm−1. A close relationship between the Si-H bond content and the conductivity is confirmed.
PACS: 78.30.-j – Infrared and Raman spectra / 81.07.Bc – Nanocrystalline materials / 81.15.Cd – Deposition by sputtering / 68.55.Jk – Structure and morphology; thickness; crystalline orientation and texture
© EDP Sciences, 2006
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