Eur. Phys. J. Appl. Phys.
Volume 27, Number 1-3, July-September 2004Tenth International Conference on Defects: Recognition, Imaging and Physics in Semiconductors (DRIP X)
|Page(s)||495 - 498|
|Section||Electronic properties through contactless characterisation|
|Published online||15 July 2004|
Non-contact C-V measurements of ultra thin dielectrics
Semiconductor Diagnostics Inc. 3650 Spectrum Blvd.
#130, Tampa, FL 33612, USA
Corresponding author: firstname.lastname@example.org
Accepted: 29 January 2004
Published online: 15 July 2004
In this paper, we present a non-contact C-V technique for ultra-thin dielectrics on silicon. The technique uses incremental corona charging of dielectric and a measurement of the surface potential with a vibrating capacitive electrode. A differential quasistatic C-V curve is generated using time-resolved measurements. The technique incorporates transconductance corrections that enable corresponding ultra-low electrical oxide thickness (EOT) determination down to the sub-nanometer range. It also provides a means for monitoring the flat band voltage, VFB, the interface trap spectrum, DIT, and the total dielectric charge, QTOT. This technique is seen as a replacement for not only MOS C-V measurements but also for mercury-probe C-V. In addition, EOT measurement by the corona C-V has a major advantage over optical thickness methods because it is not affected by water adsorption and molecular airborne contamination, MAC. These effects have been a problem for optical metrology of ultra-thin dielectrics.
PACS: 77.55.+f – Dielectric thin films / 52.80.Hc – Glow; corona / 84.37.+q – Electric variable measurements (including voltage, current, resistance, capacitance, inductance, impedance, and admittance, etc.)
© EDP Sciences, 2004
Current usage metrics show cumulative count of Article Views (full-text article views including HTML views, PDF and ePub downloads, according to the available data) and Abstracts Views on Vision4Press platform.
Data correspond to usage on the plateform after 2015. The current usage metrics is available 48-96 hours after online publication and is updated daily on week days.
Initial download of the metrics may take a while.