Study of the structure of PZT films: influence of the thermal treatments. Advanced ferroelectric characterisation

¹ PPSM (CNRS UMR 8531), ENS Cachan, 61 avenue du Président Wilson, 94235 Cachan Cedex 4, France
² SATIE (CNRS UMR 8029), ENS Cachan, 61 avenue du Président Wilson, 94235 Cachan Cedex 4, France
³ LPCML (CNRS UMR 5620), Université Lyon I, 10 rue A.M. Ampère, 69622 Villeurbanne Cedex, France

Corresponding author: cima@satie.ens-cachan.fr

Received: 26 September 2002
Revised: 23 September 2003
Accepted: 14 October 2003
Published online: 19 January 2004

Abstract

Thin films of PbZrTi_xO₃ have been elaborated using the sol-gel process. We have characterised the thermal behaviour of the sol and of the film of PZT. The different orientations were observed according to the temperature of pyrolysis: [111] at 500 °C, [100] at 450 °C. Finally, an advanced method of electrical characterisation of ferroelectrics is used by separating the reversible and irreversible contributions of polarisation. An experimental Preisach density is then measured and modeled and allows to extract ferroelectric properties. These parameters are independent from electric field strength applied through the sample, leading to a powerful tool to characterise the electrical behaviour.