Issue |
Eur. Phys. J. AP
Volume 23, Number 2, August 2003
|
|
---|---|---|
Page(s) | 89 - 93 | |
Section | Surfaces, Interfaces and Films | |
DOI | https://doi.org/10.1051/epjap:2003039 | |
Published online | 12 June 2003 |
https://doi.org/10.1051/epjap:2003039
Pulsed laser deposition of barium metaplumbate thin films for ferroelectric capacitors
1
INESC-Porto, Unidade de Optoelectrónica e Sistemas Electrónicos, 4169-007 Porto,
Portugal
2
Universidade de Trás-os-Montes e Alto Douro, Departamento de Física, 5001-911 Vila
Real, Portugal
3
Universidade de Aveiro, Departamento de Engenharia Cerâmica e do Vidro, 3810-193,
Aveiro, Portugal
Corresponding author: andrei@hobbit.fc.up.pt
Received:
21
November
2002
Revised:
5
March
2003
Accepted:
8
April
2003
Published online:
12
June
2003
Barium metaplumbate thin films were deposited in situ by pulsed laser deposition on Si/SiO2/Ti/Pt substrates with a high deposition rate. The temperatures used ranged between 400 °C and 700 °C. As the deposition temperature was increased, the films assumed a strong (222) preferential orientation. This orientation of the electrodes was reflected on the PZT films, having a very big influence on their ferroelectric behavior. The PZT films made over BPO deposited at high temperature presented high values of remanent polarization (43 μC/cm2) but indications of high leakage currents could be observed in the hysteresis loops. By using BPO bottom electrodes, a 30% improvement in the fatigue behavior of PZT capacitors when compared with the normal platinum electrodes was observed.
PACS: 68.55.Jk – Structure and morphology; thickness; crystalline orientation and texture / 77.80.Dj – Domain structure; hysteresis / 81.15.Fg – Laser deposition
© EDP Sciences, 2003
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