Eur. Phys. J. AP
Volume 23, Number 2, August 2003
|Page(s)||89 - 93|
|Section||Surfaces, Interfaces and Films|
|Published online||12 June 2003|
Pulsed laser deposition of barium metaplumbate thin films for ferroelectric capacitors
INESC-Porto, Unidade de Optoelectrónica e Sistemas Electrónicos, 4169-007 Porto,
2 Universidade de Trás-os-Montes e Alto Douro, Departamento de Física, 5001-911 Vila Real, Portugal
3 Universidade de Aveiro, Departamento de Engenharia Cerâmica e do Vidro, 3810-193, Aveiro, Portugal
Corresponding author: firstname.lastname@example.org
Revised: 5 March 2003
Accepted: 8 April 2003
Published online: 12 June 2003
Barium metaplumbate thin films were deposited in situ by pulsed laser deposition on Si/SiO2/Ti/Pt substrates with a high deposition rate. The temperatures used ranged between 400 °C and 700 °C. As the deposition temperature was increased, the films assumed a strong (222) preferential orientation. This orientation of the electrodes was reflected on the PZT films, having a very big influence on their ferroelectric behavior. The PZT films made over BPO deposited at high temperature presented high values of remanent polarization (43 μC/cm2) but indications of high leakage currents could be observed in the hysteresis loops. By using BPO bottom electrodes, a 30% improvement in the fatigue behavior of PZT capacitors when compared with the normal platinum electrodes was observed.
PACS: 68.55.Jk – Structure and morphology; thickness; crystalline orientation and texture / 77.80.Dj – Domain structure; hysteresis / 81.15.Fg – Laser deposition
© EDP Sciences, 2003
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