Eur. Phys. J. AP
Volume 19, Number 2, August 2002
|Page(s)||83 - 87|
|Section||Organic Materials and Devices|
|Published online||24 July 2002|
Tuning growth from clusters to continuous ultrathin films: Experiments and molecular dynamics simulations of Pd plasma sputter deposition
Groupe de Recherches sur l'Énergétique des Milieux Ionisés,
(UMR 6606 CNRS) Université d'Orléans, BP 6744, 45067 Orléans Cedex 2, France
2 Centre de Recherche sur la Matière Divisée, (UMR 6619 CNRS) Université d'Orléans, 45071 Orléans Cedex 2, France
Corresponding author: Pascal.Brault@univ-orleans.fr
Revised: 13 June 2002
Accepted: 13 June 2002
Published online: 24 July 2002
Plasma sputter deposition experiments and simple molecular dynamics calculations are performed for highlighting the effects of plasma ions and kinetic energy of palladium atoms on the morphology of thin films. A transition between cluster and continuous film growth is observed. It is attributed to the kinetic energy of the depositing sputtered palladium atoms and to high binding energy trapping sites resulting from the effects of ions incident on the surface during deposition. These high binding energy trapping sites act as additional nucleation centres that are allowed to be visited by the diffusing Pd atoms.
PACS: 81.15.Cd – Deposition by sputtering / 68.55.Ac – Nucleation and growth: microscopic aspects / 31.15.Qg – Molecular dynamics and other numerical methods
© EDP Sciences, 2002
Current usage metrics show cumulative count of Article Views (full-text article views including HTML views, PDF and ePub downloads, according to the available data) and Abstracts Views on Vision4Press platform.
Data correspond to usage on the plateform after 2015. The current usage metrics is available 48-96 hours after online publication and is updated daily on week days.
Initial download of the metrics may take a while.