Optimized reactor for Pb(Zr,Ti)O₃ precursor synthesis^*

¹ Systèmes Mésoélectroniques-Capteurs, LESiR (ESA 8029) and PPSM (UMR 8531), ENS de Cachan, 61 avenue of Président Wilson, 94235 Cachan, France
² Thomson-CSF, Laboratoire Central de Recherche, Domaine de Corbeville, 91404 Orsay Cedex, France

Corresponding author: pennan@lesir.ens-cachan.fr

Received: 23 March 2000
Revised: 12 October 2000
Accepted: 12 October 2000
Published online: 15 December 2000

Abstract

Synthesis of PZT solutions for thin films applications are realised either by sol-gel methods using reactive precursors or by MOD (metallorganic deposition) methods using heavy and/or hydrophobic precursors (applications: piezo or pyroelectric devices, integrated capacitors). Understanding these processes is difficult because of the complex chemistry of alkoxides. A specific MOD solution to produce PZT films is taken as an example to study the most important parameters influencing the behaviour of the final solution during deposition (spin coating) and subsequent thermal treatments. In this context a pilot reactor was developed in order to control and to measure this main parameters with the objective of a process optimization.