Eur. Phys. J. AP
Volume 5, Number 2, February 1999
|Page(s)||143 - 148|
|Published online||15 February 1999|
Backscattering of electrons from selected oxides: MgO, SiO2, and Al2O3
Advanced Materials Division, ITC and INFM, 38050 Povo, Trento, Italy
2 INFM and Physics Department, Trento University, 38050 Povo, Trento, Italy
Revised: 5 November 1998
Accepted: 19 November 1998
Published online: 15 February 1999
The inelastic and elastic cross-sections of an interacting electron beam with MgO, SiO2, and Al2O3 have been calculated and tabulations are provided for primary electron energies lower than 10 keV. By using the tabulated cross-sections, a Monte-Carlo simulation is utilized to obtain the backscattering coefficient in the energy range 1–10 keV
PACS: 72.20.Dp – General theory, scattering mechanisms / 79.20.-m – Impact phenomena (including electron spectra and sputtering)
© EDP Sciences, 1999
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