| Issue |
Eur. Phys. J. Appl. Phys.
Volume 89, Number 2, February 2020
Disordered Semiconductors: Physics and Applications
|
|
|---|---|---|
| Article Number | 20401 | |
| Number of page(s) | 6 | |
| Section | Nanomaterials and Nanotechnologies | |
| DOI | https://doi.org/10.1051/epjap/2020190263 | |
| Published online | 15 April 2020 | |
https://doi.org/10.1051/epjap/2020190263
Regular Article
Synthesis and surface modification of light emitting silicon nanoparticles using non-thermal plasma techniques★
Institute of Physics of the Czech Academy of Sciences, Cukrovarnická 10, 16200 Praha, Czech Republic
* e-mail: mullerm@fzu.cz
Received:
2
September
2019
Received in final form:
31
January
2020
Accepted:
18
February
2020
Published online: 15 April 2020
We have synthesised silicon nanoparticles (Si-NPs) with photoluminescence ranging from blue to IR spectral region using a low-pressure RF plasma in a flow-through glass tube reactor. The spectral position of photoluminescence band of Si-NPs is controlled by the synthesis parameters such as plasma power, silane and hydrogen concentration and pressure in the working area. Modification of Si-NPs surface both on air after the synthesis and in the vacuum chamber by second plasma in methylsilane atmosphere causes a blue spectral shift of the photoluminescence band.
© EDP Sciences, 2020
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