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Amorphous to crystalline induced CoSi₂ phase formation in Co-implanted Si

S. Abhaya, G. Amarendra, S. Kalavathi, B. K. Panigrahi, S. Saroja, K. G. M. Nair, V. S. Sastry and C. S. Sundar

Eur. Phys. J. Appl. Phys., 41 2 (2008) 107-110

Published online: 06 February 2008

DOI: 10.1051/epjap:2008005

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The European Physical Journal Applied Physics (EPJ AP)

Editors-in-Chief: Vincent Mauchamp and Philippe Moreau - Editorial board
ISSN: 1286-0042 - eISSN: 1286-0050
Frequency: monthly
Copyright / Published by: EDP Sciences

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Amorphous to crystalline induced CoSi2 phase formation in Co-implanted Si

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Amorphous to crystalline induced CoSi₂ phase formation in Co-implanted Si