Non-contact C-V measurements of ultra thin dielectrics P. Edelman, A. Savtchouk, M. Wilson, J. D'Amico, J. N. Kochey, D. Marinskiy and J. Lagowski Eur. Phys. J. Appl. Phys., 27 1-3 (2004) 495-498 Published online: 15 July 2004 DOI: 10.1051/epjap:2004119-12