The European Physical Journal Applied Physics (EPJ AP)

Structural and electrical characterization of n⁺-type ion-implanted 6H-SiC

D. Goghero, F. Giannazzo, V. Raineri, P. Musumeci and L. Calcagno

Eur. Phys. J. Appl. Phys., 27 1-3 (2004) 239-242

Published online: 15 July 2004

DOI: 10.1051/epjap:2004112

D. Goghero

F. Giannazzo

V. Raineri

P. Musumeci

L. Calcagno

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