The European Physical Journal Applied Physics (EPJ AP)

Microscopic defects and homogeneity investigations in 4H-SiC epitaxial wafers by UV scanning photoluminescence spectroscopy

I. El Harrouni, J.-M. Bluet, D. Ziane, C. Sartel and G. Guillot

Eur. Phys. J. Appl. Phys., 27 1-3 (2004) 235-238

Published online: 15 July 2004

DOI: 10.1051/epjap:2004105

I. El Harrouni

J.-M. Bluet

D. Ziane

C. Sartel

G. Guillot

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