The European Physical Journal Applied Physics (EPJ AP)

Diminution of the activity of B atoms by H-induced defects in H₂ and B₂H₆ co-implanted Si

Katsuhiro Yokota, Syuusaku Nakase, Kazuhiro Nakamura, Fumiyoshi Miyashita, Masayasu Tannjou, Shigeki Sakai and Hiromichi Takano

Eur. Phys. J. Appl. Phys., 27 1-3 (2004) 129-132

Published online: 15 July 2004

DOI: 10.1051/epjap:2004082

Katsuhiro Yokota

Syuusaku Nakase

Kazuhiro Nakamura

Fumiyoshi Miyashita

Masayasu Tannjou

Shigeki Sakai

Hiromichi Takano

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