Scanning room temperature photoluminescence in SiNx:H layers I. Tarasov, M. Dybiec, S. Ostapenko, A. Rohatgi, V. Yelundur and A. M. Gabor Eur. Phys. J. Appl. Phys., 27 1-3 (2004) 289-291 Published online: 15 July 2004 DOI: 10.1051/epjap:2004046