The European Physical Journal Applied Physics (EPJ AP)

High density plasma enhanced chemical vapor deposition of optical thin films

D. Daineka, P. Bulkin, G. Girard, J.-E. Bourée and B. Drévillon

Eur. Phys. J. Appl. Phys., 26 1 (2004) 3-9

Published online: 04 March 2004

DOI: 10.1051/epjap:2004013

D. Daineka

P. Bulkin

G. Girard

J.-E. Bourée

B. Drévillon

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