The European Physical Journal Applied Physics (EPJ AP)

Identification of hydrogen related defects in proton implanted float-zone silicon

P. Lévêque, A Hallén, B. G. Svensson, J. Wong-Leung, C. Jagadish and V. Privitera

Eur. Phys. J. AP, 23 1 (2003) 5-9

Published online: 29 November 2002

DOI: 10.1051/epjap:2002113

P. Lévêque

A Hallén

B. G. Svensson

J. Wong-Leung

C. Jagadish

V. Privitera

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