Feasibility of X-ray fluorescence imaging in a SEM using pinhole relay optics D. Erre, H. Jibaoui, S. Rondot and D. Mouze Eur. Phys. J. AP, 14 2 (2001) 143-146 Published online: 15 May 2001 DOI: 10.1051/epjap:2001150