Issue |
Eur. Phys. J. AP
Volume 14, Number 2, May 2001
|
|
---|---|---|
Page(s) | 143 - 146 | |
Section | Instrumentation and Metrology | |
DOI | https://doi.org/10.1051/epjap:2001150 | |
Published online | 15 May 2001 |
https://doi.org/10.1051/epjap:2001150
Feasibility of X-ray fluorescence imaging in a SEM using pinhole relay optics
Dynamique des Transferts aux Interfaces (DTI) (CNRS UMR 6107), Faculté des Sciences, BP 1039, 51687 Reims Cedex 2, France
Corresponding authors: damien.erre@univ-reims.fr hussein.jibaoui@univ-reims.fr
Received:
1
August
2000
Revised:
1
December
2000
Accepted:
13
February
2001
Published online: 15 May 2001
The feasibility of imaging by X-ray fluorescence in a SEM has been tested on a simple laboratory set-up. It has been demonstrated that images generated by the fluorescent X-rays can be directly obtained with the use of simple pinhole relay optics and an incident X-ray beam created in a SEM. These images were acquired with a charge coupled device (CCD) camera coupled to a phosphor screen by a fibre-optic faceplate. This technique provides chemical and topographical images with a spatial resolution in the object plane of a few micrometres. This “global” imaging has the advantage that the acquisition time is only a few minutes for a sample surface of a few mm2.
PACS: 07.85.-m – X- and gamma-ray instruments
© EDP Sciences, 2001
Current usage metrics show cumulative count of Article Views (full-text article views including HTML views, PDF and ePub downloads, according to the available data) and Abstracts Views on Vision4Press platform.
Data correspond to usage on the plateform after 2015. The current usage metrics is available 48-96 hours after online publication and is updated daily on week days.
Initial download of the metrics may take a while.