The European Physical Journal Applied Physics (EPJ AP)

Conventional and high power impulse magnetron sputtering deposition of tantalum nitride films: a molecular dynamics approach

Pascal Brault, Marjorie Cavarroc-Weimer, Sara Fazeli and Nicolas Froloff

Eur. Phys. J. Appl. Phys., 100 (2025) 12

Published online: 06 May 2025

DOI: 10.1051/epjap/2025012

Pascal Brault

Marjorie Cavarroc-Weimer

Sara Fazeli

Nicolas Froloff

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