The European Physical Journal Applied Physics (EPJ AP)

On the target surface temperature during dc magnetron sputtering

Leonid R. Shaginyan, Vasily R. Shaginyan, Anatoly I. Kuzmichev and Mikhail I. Mironov

Eur. Phys. J. Appl. Phys., 92 1 (2020) 10801

Published online: 02 October 2020

DOI: 10.1051/epjap/2020200098

Leonid R. Shaginyan

Vasily R. Shaginyan

Anatoly I. Kuzmichev

Mikhail I. Mironov

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