The European Physical Journal Applied Physics (EPJ AP)

Monte Carlo study of the effective electron beam shape in scanning electron microscopic imaging

Peng Zhang, Shifeng Mao and Zejun Ding

Eur. Phys. J. Appl. Phys., 69 3 (2015) 30703

Published online: 12 March 2015

DOI: 10.1051/epjap/2015140420

Peng Zhang

Shifeng Mao

Zejun Ding

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