The European Physical Journal Applied Physics (EPJ AP)

Nanostructural defects evidenced in failing silicon-based NMOS capacitors by advanced failure analysis techniques

Emilie Faivre, Roxane Llido, Magali Putero, Lahouari Fares and Christophe Muller

Eur. Phys. J. Appl. Phys., 66 1 (2014) 10103

Published online: 21 April 2014

DOI: 10.1051/epjap/2014130386

Emilie Faivre

Roxane Llido

Magali Putero

Lahouari Fares

Christophe Muller

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