The European Physical Journal Applied Physics (EPJ AP)

Charge storage characteristics of atomic layer deposited ZrO₂/Al₂O₃ multilayered films

Zhenjie Tang, Rong Li, Xinhua Zhu and Zhiguo Liu

Eur. Phys. J. Appl. Phys., 60 3 (2012) 30301

Published online: 12 December 2012

DOI: 10.1051/epjap/2012120351

Zhenjie Tang

Rong Li

Xinhua Zhu

Zhiguo Liu

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