The European Physical Journal Applied Physics (EPJ AP)

Influence of nitrogen impurities on the formation of active species in Ar-O₂ plasmas

V. Guerra, K. Kutasi, P.A. Sá and M. Lino da Silva

Eur. Phys. J. Appl. Phys., 56 2 (2011) 24004

Published online: 28 October 2011

DOI: 10.1051/epjap/2011110194

V. Guerra

K. Kutasi

P.A. Sá

M. Lino da Silva

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