Investigation of mechanical stresses in β-Ga2O3 films obtained by radio frequency magnetron sputtering on porous-Si/Si substrate
Andriy S. Revenko, Valerii V. Kidalov, Mykhailo P. Derhachov, Roman A. Redko, Robert P. Johnson, Marc A. Assmann, Olexandr I. Gudymenko, Oleksii O. Sushko and Mykhailo M. Koptiev
