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Bias voltage effect on magnetron sputtered titanium aluminum nitride TiAlN thin films properties

Zouina Amina Ait-Djafer, Nadia Saoula, Daniel Wamwangi, Noureddine Madaoui and Hamid Aknouche

Eur. Phys. J. Appl. Phys., 86 3 (2019) 30301

DOI: https://doi.org/10.1051/epjap/2019180344

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