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Strong white and blue photoluminescence from silicon nanocrystals in SiNxgrown by remote PECVD using SiCl4/NH3

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DOI: 10.1088/0957-4484/18/15/155704
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Physicochemical and structural properties of ultra thin films with embedded silicon particles

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Surface and Coatings Technology 201 (22-23) 9179 (2007)
DOI: 10.1016/j.surfcoat.2007.04.006
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