Articles citing this article

The Citing articles tool gives a list of articles citing the current article.
The citing articles come from EDP Sciences database, as well as other publishers participating in CrossRef Cited-by Linking Program. You can set up your personal account to receive an email alert each time this article is cited by a new article (see the menu on the right-hand side of the abstract page).

Cited article:

Strain field reconstruction in shallow trench isolation structures by CBED and LACBED

A. Spessot, S. Frabboni, R. Balboni and A. Armigliato
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 253 (1-2) 149 (2006)
https://doi.org/10.1016/j.nimb.2006.10.052

Direct strain measurement in a 65nm node strained silicon transistor by convergent-beam electron diffraction

Peng Zhang, Andrei A. Istratov, Eicke R. Weber, Christian Kisielowski, Haifeng He, Chris Nelson and John C. H. Spence
Applied Physics Letters 89 (16) (2006)
https://doi.org/10.1063/1.2362978