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Monte Carlo Simulation of Chemical Reactions in Plasma Enhanced Chemical Vapor Deposition: from Microscopic View to Macroscopic Results

O. Babahani, S. Hadjadj, F. Khelfaoui, H. O. Kebaili and S. Lemkeddem
Silicon 11 (3) 1267 (2019)
DOI: 10.1007/s12633-018-9916-y
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Theory, Application, and Implementation of Monte Carlo Method in Science and Technology

Fethi Khelfaoui and Oumelkheir Babahani
Theory, Application, and Implementation of Monte Carlo Method in Science and Technology (2019)
DOI: 10.5772/intechopen.88559
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