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Global Model of $\hbox{Cl}_{2}\hbox{/Ar}$ High-Density Plasma Discharge and 2-D Monte-Carlo Etching Model of InP

R. Chanson, A. Rhallabi, M. C. Fernandez, et al.
IEEE Transactions on Plasma Science 40 (4) 959 (2012)
DOI: 10.1109/TPS.2012.2183391
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Modeling of InP Etching Under ICP Cl2/Ar/N2Plasma Mixture: Effect of N2on the Etch Anisotropy Evolution

Romain Chanson, Ahmed Rhallabi, Marie Claude Fernandez and Christophe Cardinaud
Plasma Processes and Polymers 10 (3) 213 (2013)
DOI: 10.1002/ppap.201200083
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