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Effect of C2H4/N2 Ratio in an Atmospheric Pressure Dielectric Barrier Discharge on the Plasma Deposition of Hydrogenated Amorphous Carbon-Nitride Films (a-C:N:H)

Christian Sarra-Bournet, Nicolas Gherardi, Hervé Glénat, Gaétan Laroche and Francoise Massines
Plasma Chemistry and Plasma Processing 30 (2) 213 (2010)
DOI: 10.1007/s11090-010-9214-y
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Atmospheric Pressure Low Temperature Direct Plasma Technology: Status and Challenges for Thin Film Deposition

Francoise Massines, Christian Sarra-Bournet, Fiorenza Fanelli, Nicolas Naudé and Nicolas Gherardi
Plasma Processes and Polymers 9 (11-12) 1041 (2012)
DOI: 10.1002/ppap.201200029
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Formation of nanoparticles and nanorods in a N2–C2H4–H2 atmospheric pressure dielectric barrier Townsend discharge

Christian Sarra-Bournet, Nicolas Gherardi, Gaétan Laroche and Francoise Massines
Thin Solid Films 518 (17) 4828 (2010)
DOI: 10.1016/j.tsf.2010.01.062
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