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Cited article:

Single composite target magnetron sputter deposition of crystalline and amorphous SiC thin films

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https://doi.org/10.1088/2053-1591/aab3b0

Structural, optical, dielectric and electrical studies on RF sputtered nanocrystalline Zr doped MgTiO3 thin films

Pallabi Gogoi, T. Santhosh Kumar, Pramod Sharma and D. Pamu
Journal of Alloys and Compounds 619 527 (2015)
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Effect of post annealing on structural, optical and dielectric properties of MgTiO3 thin films deposited by RF magnetron sputtering

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Dielectric properties of ambient temperature grown nanocrystalline ZrTiO4 thin films using DC magnetron sputtering

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Materials Science and Engineering: B 168 (1-3) 208 (2010)
https://doi.org/10.1016/j.mseb.2009.12.028

Preparation and Characterization of ZST Films for CMOS Applications

D. Pamu, K. Sudheendran, M. Ghanashyam Krishna and K. C. James Raju
Integrated Ferroelectrics 117 (1) 110 (2010)
https://doi.org/10.1080/10584587.2010.489433