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Cited article:

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Structural and nanomechanical properties of InN films grown on Si(1 0 0) by femtosecond pulsed laser deposition

M A Hafez, M A Mamun, A A Elmustafa and H E Elsayed-Ali
Journal of Physics D: Applied Physics 46 (17) 175301 (2013)
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INFLUENCE OF SUBSTRATE TEMPERATURE ON STRUCTURAL, ELECTRICAL AND OPTICAL PROPERTIES OF ITO THIN FILMS PREPARED BY RF MAGNETRON SPUTTERING

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Low-temperature growth of InN on Si(100) by femtosecond pulsed laser deposition

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The properties of direct current sputtering deposited InN thin films under different gas flow rates

Xing-Min Cai, Fan Ye, Yan-Qing Hao, et al.
Journal of Alloys and Compounds 484 (1-2) 677 (2009)
https://doi.org/10.1016/j.jallcom.2009.05.021